Course Description

MEMS (Microelectromechanical Systems) is one of the most important high technologies developed in 20th century. This course covers the fundamentals of MEMS. It includes the introduction to MEMS, basic microfabrication techniques, MEMS materials and their properties, MEMS device design and simulation, working principle analysis, MEMS device fabrication sequence, MEMS packaging and assembly, signal testing, MEMS device case study.

Classes

3 lecture hours
3 semester hours